EXCIMER LASERS & UV OPTICAL SYSTEMS Product Catalogcoherent.com 1Superior Reliability & Performance 2 TABLE OF CONTENTS Introduction 4-9 ExciStar 10-12 IndyStar 13-15 COMPex 16-19 LEAP 20-23 LAMBDA SX 24-26 VYPER/TwinVYPER/TriVYPER 27-30 Table of Contents Excimer Lasers and UV Optical Systems ExciStar IndyStar COMPex LEAP LAMBDA SX VYPERcoherent.com 3 TABLE OF CONTENTS UVblade 31-33 LineBeam 34-36 VarioLas 37-39 GeoLasHD 40-42 Components/Laser Measurement & Control 43-47 Service/Training/Applications 48-53 Doing Business with Coherent 54 How to Contact Us 55 Excimer Lasers and UV Optical Systems Table of Contents Service/ContactComponents/LMC GeoLasHD VarioLas LineBeam UV bladeSuperior Reliability & Performance 4 10 11010010,0001000 Average Power (W) Pulse Energy (mJ) 100 1000 10,000 With 50 years of experience in UV lasers, Coherent understands that getting the best results requires an excimer laser that matches your application. That’s why we offer the widest selection of excimer laser power and energy options. Scalable Power. Ultimate Precision. Quick Selection Chart Excimer Lasers and UV Optical Systems 10 110 Average Power (W) Pulse Energy (mJ) 100 1000 10,000 ExciStar IndyStar COMPex LEAP LAMBDA SX VYPERcoherent.com 5 110010,0001000 ge Power (W) Excimer Lasers and UV Optical Systems Quick Selection Chart 157193248308351 Wavelength (nm) Service/ContactComponents/LMC GeoLasHD VarioLas LineBeam UV bladeSuperior Reliability & Performance 6 Onsite Requirements Onsite Requirements Excimer Lasers and UV Optical Systems COOLING POWER Air-Cooling (air-to-air exchange) Single-phase AC 230V, 50/60 Hz 208 V, 50/60 Hz 120 V, 50/60 Hz 104 V, 50/60 Hz Single-phase AC 230V, 50/60 Hz Three-phase AC 200/208V, 50/60 Hz or 400V, 50/60 Hz Three-phase AC 400V 50/60 Hz (190 to 480V with transformer) ExciStar COMPex <20 Hz COMPexLEAP ExciStar IndyStar LAMBDA SX VYPER COMPex >20 Hz LEAP LAMBDA SX/VYPER IndyStar Water-Cooling (water-to-water exchange) EXCIMER LASER ExciStar IndyStar COMPex LEAP LAMBDA SX VYPERcoherent.com 7 Excimer Laser Gases Excimer Lasers and UV Optical Systems Excimer Laser Gases COMPex LEAP LAMBDA SX VYPER ExciStar IndyStar COMPex Premix Gas Operation Single Gas Operation PremixHelium HalogenNeonRare GasHelium Where to Buy Excimer Gases and Gas Installation Equipment The gas concentrations, mixtures, and puities are specified for each laser model and each laser wavelength and are listed in the user manual. Excimer laser gases and gas installation equipment are available from various suppliers, some of whom are listed below: www.praxair.com/international-locations www.lasergas.com/globallocations.html www.scicalgas.com/contact/ www.linde-worldwide.com/en/index.html www.airgas.com/solutions/specialty-gases/gas-mixtures www.airproducts.com/products/gases.aspx Service/ContactComponents/LMC GeoLasHD VarioLas LineBeam UV bladeNext >