< PreviousSuperior Reliability & Performance 8 Applications Matrix Applications Matrix Excimer Lasers and UV Optical Systems Marking Polymer, Teflon Marking • • • Visible and Invisible Marking (Eyeglass Marking, etc.) • • • Diamond and Jewel Marking • • • Material Processing Polymer Drilling (Inkjet Nozzle, Filter) • • • Hard and Brittle Drilling • • • • FBG Writing • • Thin Film Structuring (TCO, ITO, ZnO, FiNx, etc.) • • • Laser Lift-Off (LLO) • • • • Surface Treatment Excimer Laser Annealing (ELA/SLS) • • Cylinder Honing • • Pulsed Laser Deposition (PLD) • • • • Laser Direct Synthesis (LDS) • • Laser Direct Patterning (LDP) • • • Laser-Induced Forward Transfer (LIFT) • • • • Ion Implantation/Doping/Implant Activation • • • • Surface Cleaning • • • • • • Measurement Combustion Analysis • • Optics/Coating Testing • • Mask Inspection • • Spectroscopy, LIDAR • • • Laser-Induced Fluorescence (LIF) • • • Medical Procedures Psoriasis/Vitiligo Treatment • Refractive Eye Surgery (Lasik) • IndyStarCOMPexLEAPExciStarLAMBDA SXVYPER ExciStar IndyStar COMPex LEAP LAMBDA SX VYPERcoherent.com 9 Elevate Your UV Laser Application Explore the Complete Coherent Laser Portfolio and Find Your Excimer Laser Solution by Visiting Our Website. Accessories Application Reports Enhanced Application Finder Technical Illustrations, Videos Brochures, Tech Notes, Data Sheets Excimer Lasers and UV Optical Systems Elevate Your UV Laser Application Service/ContactComponents/LMC GeoLasHD VarioLas LineBeam UV bladeSuperior Reliability & Performance 10 Compact, High Repetition Rate Excimer Laser ExciStar excimer lasers are table top-size lasers designed for easy system integration. The proven ALMETA tube design ensures industrial-grade performance and endurance. Thousands of ExciStar lasers serve a broad range of delicate tasks including cornea ablation, prescription lens marking, and optical sensor manufacturing. FEATURES & BENEFITS • Ultrashort 193 nm and 248 nm wavelengths for superior ablation and marking • High repetition rate to enable fast and flexible processing • Ultimate pulse control to ensure effective use of photons • ALMETA tube with integrated heating device to ensure reproducible results • Air-cooled, single-phase design, premix gas supply and CE-declaration compliance for easy integration APPLICATIONS • LASIK Vision Correction • UV Precision Marking • LA-ICP-MS Analysis • FBG Writing ExciStarcoherent.com 11 SPECIFICATIONSExciStar 200 ExciStar 500ExciStar 1000 Wavelength (nm)193248193248193248 Max. Repetition Rate (Hz)20020050050010001000 Stabilized Pulse Energy (mJ)510510510 Max. Pulse Energy (mJ)121612161216 Stabilized Power 1 (W)122.55510 Beam Dimension 1 (FWHM, mm, V x H)(5.8 ±0.5) x (2.6 ±0.5) (5.6 ±0.5) x (2.6 ±0.5) (5.8 ±0.5) x (2.6 ±0.5) (5.6 ±0.5) x (2.6 ±0.5) (5.8 ±0.5) x (2.6 ±0.5) (5.6 ±0.5) x (2.6 ±0.5) Energy Stability 1 (sigma, %)<2 (valid for >5 mJ/193 nm and >10 mJ/248 nm) Beam Divergence 1 (FWHM, mrad, V x H)<3.0 x 1.5 Pulse Duration 1 (FWHM, ns)7 ±2 CoolingAir Weight (kg)66 kg (145.5 lbs.) Laser Dimensions (L x W x H)650 x 300 x 400 mm (25.6 x 11.8 x 15.75 in.) Electrical230 V, 50/60 Hz, single phase Discharge Voltage (V) 0.00 1 2 3 4 5 6 7 8 9 10 4.0 8.0 12.0 16.0 20.0 6007008009001000110012001300140015001600 Pulse Energy (mJ) Energy Stability (1 sigma, %) Sigma(U)/193 nm E(U)/248 nm E(U)/193 nm Sigma(U)/248 nm ExciStar Performance at 193 nm and 248 nm/500 Hz Excimer Lasers and UV Optical Systems ExciStar ExciStarSuperior Reliability & Performance 12 MECHANICAL SPECIFICATIONS Side ViewRear View Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com ISO 9001 Registered Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all ExciStar lasers. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. AVERAGE POWER: 18 W MAX. OUTPUT ENERGY: 25 mJ/pulse PULSE DURATION: 3 to 15 ns WAVELENGTH: 157 to 351 nm, 620 to 800 nm ExciStar Excimer Lasers and UV Optical Systems ExciStarcoherent.com 13 Fast Pulse, High Precision Processing IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short 193 nm and 248 nm wavelengths. The IndyStar series is engineered to meet the highest demands in every aspect of an industrial laser. FEATURES & BENEFITS • Repetition rate of 1 and 2 kHz for fast processing • TimeLok and PowerLok functionalities for ultimate pulse control • ALMETA tube design to ensure most efficient processing • Semi-S2 compliance and premix gas supply to facilitate production floor integration APPLICATIONS • Photomask Inspection • Inkjet Nozzle Drilling • Optics Testing IndyStarSuperior Reliability & Performance 14 SPECIFICATIONSIndyStar 193 1 kHz IndyStar 193 2 kHz IndyStar 248 1 kHz IndyStar 248 2 kHz Wavelength (nm)193193248248 Recommended Stabilized Pulse Energy (mJ)84126 Recommended Stabilized Pulse Power (W)881212 Energy Stability (sigma, %)<2<2<2<2 Max. Repetition Rate (Hz)1000200010002000 Beam Dimension (FWHM, mm, V x H)(5.7 ±0.5) x (2.5 ±0.5)(5.5 ±0.5) x (2.3 ±0.5)(5.7 ±0.5) x (2.7 ±0.5)(5.5 ±0.5) x (2.6 ±0.5) Beam Divergence (FWHM, mm, V x H)(2.25 ±0.5) x (1.0 ±0.5)(2.75 ±0.5) x (1.0 ±0.5)(2.4 ±0.5) x (1.6 ±0.5)(2.5 ±0.5) x (1.5 ±0.5) Pulse Duration (FWHM, ns)5 ±24 ±16 ±24 ±1 CoolingAir/WaterWaterAir/WaterWater Weight135 kg (297 lbs.) Laser Dimensions974 x 381 x 838 mm (48.23 x 7.8 x 8.96 in.) Electrical230 V (1-phase) / 208 V (2-phase), 50/60 Hz, 2100 VA Part Number1166017116291811660181166016 IndyStar Excimer Lasers and UV Optical Systems IndyStar Series Energy Performance Pulse Energy (mJ) High Voltage (%) 0 5 10 15 20 25 0102030405060708090100 IndyStar 193 nm/2 kHz IndyStar 248 nm/1 kHz IndyStar 193 nm/1 kHz IndyStar 248 nm/2 kHz IndyStarcoherent.com 15 Excimer Lasers and UV Optical Systems IndyStar MECHANICAL SPECIFICATIONS IndyStar 381 mm (15 in.) 190.5 mm (7.5 in.) 182 mm (7.2 in.) 35 mm ±5 (1.38 in. ±0.2) 170 mm (6.7 in.) 145 mm (5.7 in.) 65.5 mm (2.6 in.) 250 mm (9.8 in.) 84.5 mm (3.3 in.) 155.5 mm (6.1 in.) 213 mm (8.4 in.) 90 mm (3.5 in.) 25 mm (0.98 in.) Leakage Water Outlet Optional Foot Position 170 mm (6.7 in.) 623 mm (24.5 in.) 22 mm (0.87 in.) 69 mm (2.72 in.) Ø 158 mm (6.22 in.) 270.5 mm (10.65 in.) 232.5 mm (9.15 in.) 181.5 mm (7.15 in.) 125.5 mm (4.94 in.) 97.5 mm (3.84 in.) 890 mm (35 in.) 800 mm (31.5 in.) 58.5 mm (2.3 in.) Front View Rear View Side View Top View Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com ISO 9001 Registered VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. AVERAGE POWER: 36 W MAX. OUTPUT ENERGY: 25 mJ/pulse PULSE DURATION: 3 to 15 ns WAVELENGTH: 193 to 248 nm Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all IndyStar Lasers. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. ACCESSORIESDescription Part Number 1285557External Heat Exchanger, water-to-air IndyStarSuperior Reliability & Performance 16 COMPex Excimer lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD) and precise material processing. Featuring new ceramic preionization, the COMPex provides multi- hundred millijoules output, plus unmatched pulse-to-pulse stability. The COMPex also comes with an improved gas processor that extends both gas and optics lifetimes. FEATURES & BENEFITS • Selection of 193 nm, 248 nm, 308 nm, and 351 nm wavelengths for full material flexibility • Superior pulse energy of up to 750 mJ to enable effective ablation at large field size • Unrivalled pulse stability of 0.75%, rms to ensure high fluence control • Ultimate pulse control and system parameter logging to deliver smart and reproducible thin films APPLICATIONS • PLD – Pulsed Laser Deposition • Thin Wafer Processing • Laser Lift-Off/Debonding • LA-ICP-MS COMPexcoherent.com 17 Excimer Lasers and UV Optical Systems COMPex SPECIFICATIONS COMPex 50 FBG COMPex 50 COMPex 102 COMPex 110 COMPex 201 COMPex 205 Wavelength (nm) Pulse Energy 1 (mJ) 193 248 308 351 - 140 - - 100 150 - - 240 400 250 200 240 400 250 200 400 750 500 300 400 750 500 300 Max. Rep. Rate (Hz)10050201001050 Average Power 2 (W) 193 248 308 351 - 12 - - 4 7 - - 4.8 8 5 4 12 30 16 12 4 7.5 3.5 3 15 33 20 15 Energy Stability 3 (1 sigma) (%)≤0.75 Pulse Duration (FWHM) (ns)202020202525 Beam Dimensions (V x H, FWHM) (mm2)12 x 4.514 x 524 x 1024 x 1024 x 1024 x 10 Beam Divergence 3 (V x H, FWHM) (mrad 2 )≤0.3 x 0.2≤2 x 1≤3 x 1≤3 x 1≤3 x 1≤3 x 1 Beam Pointing Stability 4 (1 sigma) (µrad)≤50 Spatial Coherence (FWHM) (µm) Horizontal800----- Electrical200 to 240V AC, 16A, 50/60 Hz switchable, 1-phase 100 to 120V AC, 25A, 50/60 Hz switchable, 1-phase Water Cooling 5 2 to 5 l/min. (0.5 to 1.3 gal./min.), 15 to 20°C, connection: 1/2” Weight275 kg (605 lbs.)350 kg (772 lbs.) Dimensions (L x W x H)1282 x 375 x 793 mm 3 51 x 15 x 31 in. 3 1682 x 375 x 793 mm 3 67 x 15 x 31 in. 3 Part Number F-Version C-Version 1314941 N/A 1314940 N/A 1314942 1314943 1314944 1314945 1314970 1314971 1314972 1314973 1 Measured at low repetition rate. 2 Measured at maximum repetition rate. 3 Specified at 248 nm. 4 At shutter plane over 2000 pulses. 5 Only required above 20 Hz, delivered as standard. COMPex 205 Pulse Energy over Dynamic Operating Range Energy (mJ) 0 200 400 600 800 1000 18 High Voltage (kV) 272625242322212019 COMPexNext >