< PreviousSuperior Reliability & Performance 18 COMPex Excimer Lasers and UV Optical Systems 1656.5 mm (65.22 in.) 1591.5 mm (62.66 in.) 1657.5 mm (65.26 in.) 1234.0 mm (48.58 in.) 35.0 mm (1.38 in.) 30.5 mm (1.20 in.) 353.1 mm (13.90 in.) 25.0 mm (0.98 in.) 36.0 mm (1.42 in.) 30.0 mm (1.18 in.) 141.5 mm (5.57 in.) 30.0 mm (1.18 in.) 30.0 mm (1.18 in.) 187.5 mm (7.38 in.) 170.0 mm (6.69 in.) 315.0 mm (12.40 in.) 141.5 mm (5.57 in.) 750.5 mm (29.55 in.) 603.0 mm (23.74 in.) 139.0 mm (5.47 in.) 171.5 mm (6.75 in.) 354.0 mm (13.94 in.) 518.0 mm (20.39 in.) 1256.5 mm (49.47 in.) 1257.5 mm (49.51 in.) 834.0 mm (32.83 in.) 1191.5 mm (46.91 in.) 171.5 mm (6.75 in.) 35.0 mm (1.38 in.) 30.5 mm (1.20 in.) 353.1 mm (13.90 in.) 25.0 mm (0.98 in.) 30.0 mm (1.18 in.) 36.0 mm (1.42 in.) 30.0 mm (1.18 in.) 141.5 mm (5.57 in.) 30.0 mm (1.18 in.) 30.0 mm (1.18 in.) 170.0 mm (6.69 in.) 187.5 mm (7.38 in.) 315.0 mm (12.40 in.) 141.5 mm (5.57 in.) 750.5 mm (29.55 in.) 139.0 mm (5.47 in.) 354.0 mm (13.94 in.) 518.0 mm (20.39 in.) 603.0 mm (23.74 in.) COMPex 200 Connection Side View Connection Side View Beam Exit Side View Beam Exit Side View Service Side View Service Side View MECHANICAL SPECIFICATIONS COMPex 50/100 COMPexcoherent.com 19 1 Laptop not included. HIGH SPEED USB 2.0 STANDARD A Upload/download data from the Laser SPEED USB STANDARD B Virtual Serial Port for input/output of operating modes ETHERNET NETWORK CONNECTION RJ45 Upload/download data to/from the Laser Controller Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all COMPex Lasers. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com ISO 9001 Registered VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. OUTPUT POWER: 40 W MAX. OUTPUT ENERGY: 0.8 mJ/pulse PULSE DURATION: 10 to 50 ns WAVELENGTH: 193 to 351 nm ACCESSORIESDescription Part Number 1377860 1336438 1132990 262856 1323920 1323916 26083110 262456 PLD Optics Set with X, Y, Phi-Mounts for COMPex, 248 nm Alignment Laser Temperature Stabilization Module VCR Upgrade Kit (VCR gas connections instead of Gyrolok) Pre-mounted Output Coupler for quick optics exchange, COMPex 100/200 Pre-mounted Rear Mirror for quick optics change, 248 nm Low-Divergence Optics, 248 nm, COMPex 200 Low-Divergence Optics Adapter, COMPex 100/200 COMPexSuperior Reliability & Performance 20 LEAP High Energy, High Precision Processing LEAP excimer lasers deliver a unique combination of high duty-cycle output, outstanding reliability, and low cost-of-ownership. This makes them an ideal source for a diverse assortment of demanding, high throughput, high-precision microprocessing tasks, ranging from display fabrication to reel-to-reel manufacturing of superconductive tape. LEAP lasers are available at wavelengths of either 248 nm or 308 nm, with output powers of up to 300 W (and pulse energies of up to 1 J). This power comes in a compact footprint package which is easily integrated into tools, or with other production equipment. FEATURES & BENEFITS • Compact industrial design for easy integration • Pulse-on-Demand to enable cost effective Laser-Lift-Off • High laser energy for fast and large area processing • Ethernet interface for control and fast data acquisition • 248 nm and 308 nm wavelengths for optimized processing of a large variety of materials APPLICATIONS • LLO – Laser Lift-Off • PLD – Pulsed Laser Deposition • LDP – Laser Direct Patterning • Micro-Structuring • LIFT – Laser Induced Forward Transfer LEAPcoherent.com 21 Excimer Lasers and UV Optical Systems LEAP LEAP SPECIFICATIONS LEAP 80K 130K LEAP 80C 130C LEAP 100K 150K LEAP 100C 150C LEAP 300C 300K Wavelength (nm)248308248308308 248 Stabilized Energy Range (mJ) 550 to 650550 to 650900 to 1000 1 900 to 1000900 to 1000 Max. Stabilized Average Power (W)81.25 13081.25 130100 150100 150300 Max. Repetition Rate (Hz)125 200125 200100 150100 150300 Energy Stability (1 Sigma) ≤1.2≤1.2≤1.2≤1.2≤1.2 Pulse Duration (FWHM) (ns)29 ±522 ±532 ±527 ±529 ±5 32 ±5 Beam Dimensions (V x H, FWHM) (mm2) 32 ±3.5 x 13 ±433 ±3.5 x 13 ±432 ±3.5 x 13 ±433 ±3.5 x 13 ±437 ±3.5 34 ±3.5 x 14 ±3 x 15 ±4 Divergence (V x H, FWHM) (mrad2)≤4.5 x ≤1.5≤4.5 x ≤1.5≤4.5 x ≤1.5≤4.5 x ≤1.5≤4.5 x ≤1.5 Dynamic Gas Lifetime (at max. stabilized energy) (mio. pulses) 3030303050 40 Electrical (kVA) 8.6 3-phase, 200/208 or 400 VAC, 50/60 Hz 9.6 3-phase, 200/208 or 400 VAC, 50/60 Hz 17 3-Phase 400 VAC 50/60 Hz, Water Cooling 20 l/min; T=19-21°C0-40 l/min; T=11-15°C Weight 860 kg (1896 lbs.)1100 kg (2425 lbs) Cabinet Size (L x W x H)2415 x 800 x (1090 ±10) mm 3 95.1 x 31.4 x (42.9 ±0.4) in. 3 2563 x 820 x (1125 ±10) mm 3 100.9 x 32.3 x (45.1 ±0.4) in. 3 Part Number (200/208V)1320859 (80K) 1165692 (130K) 1320859 (80C) 1165692 (130C) 1320863 (100K) 1290885 (150K) 1320861 (100C) 1290888 (150C) – – Part Number (400V)1320860 (80K) 1165694 (130K) 1320858 (80C) 1165695 (130C) 1320864 (100K) 1290886 (150K) 1320862 (100C) 1290889 (150C) 1305000 (300C) – 1 Max. pulse energy 1100 mJ at 10 Hz. 0 1400 1.5 HV/kV 1.551.61.651.71.751.8 Energy (mJ) 200 400 600 800 1000 1200 LEAP 150K 1 Joule at 150 Hz, Dynamic Energy Range (typical data) 0 3.0 0 Mio Pulses (n) 510152025 σ <0.5% 30 Energy Stability ( σ ,%) 0.5 1.0 1.5 2.0 2.5 LEAP 150K 1 Joule at 150 Hz, Energy Stability over 30 Mio. PulsesSuperior Reliability & Performance 22 LEAP Excimer Lasers and UV Optical Systems MECHANICAL SPECIFICATIONS LEAP 80/100/130/150 Beam Exit Left (view from access side) 800 mm (31.5 in.) 617.5 mm (24.3 in.)1100 mm (43.3 in.) 2295 mm (90.4 in.) 577.5 mm (22.7 in.) 560 mm (22.0 in.) 407 mm ±2 (16.0 in. ±0.08) 90 mm ±10 (3.5 in. ±0.4) 1000 mm (39.4 in.) 120 mm (4.7 in.) 389.5 mm ±2 (15.3 in. ±0.08) ca. 82.5 mm (3.25 in.) ca. 43 mm (1.7 in.) 60 mm (0.3 in.) Side View Top View Front View ACCESSORIESDescription Part Number 376252 1136303 1320865 1320866 Low-Divergence Resonator Optics, 248 nm, LEAP K-Series Transformer, 30 kVA, 190 to 480 VAC, LEAP 300C Upgrade LEAP 80 to LEAP 130 Upgrade LEAP 100 to LEAP 150 LEAPcoherent.com 23 Excimer Lasers and UV Optical Systems LEAP 2440 mm (96.1 in.) 559.75 mm (22.0 in.) 820 mm (32.3 in.) 1100 mm (43.3 in.)745 mm (29.3 in.) 595 mm (23.4 in.) 1020 mm (40.2 in.) 105 mm ±10 (4.9 in. ±0.4) 130 mm (5.1 in.) 280 mm ±2 (11.0 in. ±0.08) 400.9 mm (15.8 in.) ca. 82.5 mm (3.25 in.) ca. 40.5 mm (1.6 in.) 58.5 mm (2.3 in.) Side View Top View Front View MECHANICAL SPECIFICATIONS LEAP 300C/300K Beam Exit Right (view from access side) Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com ISO 9001 Registered VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. OUTPUT POWER: 450 W MAX. OUTPUT ENERGY: 1.5 J/pulse PULSE DURATION: 10 to 50 ns WAVELENGTH: 193 to 351 nm Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all LEAP Lasers. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. LEAPSuperior Reliability & Performance 24 High-Power Excimer Lasers The LAMBDA SX industrial excimer laser series provides unique high UV power to the production floor. It delivers high and stable pulse energy, and also features a number of innovative technologies for unsurpassed performance and reliability. LAMBDA SX lasers are perfectly suited for applications ranging from micro structuring, advanced semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). FEATURES & BENEFITS • Perfect energy stability to ensure production yield • Pulse on Demand to enable cost effective Laser Lift-Off • Laser data acquisition to allow advanced process control • Sealed and purged beam path for stable long term operation • Ethernet interface for control and fast data acquisition APPLICATIONS • Microstructuring and Drilling • Pulsed Laser Deposition • Surface Treatment LAMBDA SXcoherent.com 25 Excimer Lasers and UV Optical Systems LAMBDA SX SPECIFICATIONSLAMBDA SX E500 LAMBDA SX C600 Wavelength (nm)308308 Maximum Stabilized Pulse Energy (mJ) 10001000 Maximum Stabilized Average Power (W) 500600 Maximum Repetition Rate (Hz) 500600 Energy Stability (sigma, %) ≤0 .45≤1 Pulse Duration (FWHM) (ns) 24 ±4 24 ±4 Beam Dimensions 2 (FWHM, V x H, mm2) 35 ±4 x 14.5 ±3 35 ±4 x 14.5 ±3 Beam Divergence (FWHM, V x H, mrad2) ≤4.5 x 1≤4.5 x 1.5 Dynamic Gas Lifetime (at max. stabilized energy) (mio. pulses)60100 WEIGHT/UTILITIES/DIMENSIONS Weight 2200 k g/4850 lbs.2200 kg/4850 lbs. Cooling Water, 3 to 70 l/min. (0.8 to 18.5 gal./min.), 12 to 15°C Water, 3 to 70 l/min. (0.8 to 18.5 gal./min.), 12 to 15°C Electrical40 kVA, 3-phase, 400 VAC, 50/60 Hz 40 kVA, 3-phase, 400 VAC, 50/60 Hz Dimensions (L x W x H) 2800 x 850 x 2083 mm (110.2 x 33.3 x 82 in.) 2800 x 850 x 2083 mm (110.2 x 33.3 x 82 in.) Part Number13343591334357 (beam exit right) 1334358 (beam exit left) 1 All specifications are subject to change without prior notice in order to provide the best product possible. 2 Beam dimensions measured at 1.0m from beam exit. 3 ±20 mm (0.8 in.). ExiScope Data Analysis System energy, sum sigma, individual sigma, and much more parameter can be analyzed and displayed with the ExiScope software. LAMBDA SXSuperior Reliability & Performance 26 LAMBDA SX Excimer Lasers and UV Optical Systems MECHANICAL SPECIFICATIONS LAMBDA SX 2800 mm (110.2 in.)113.5 mm (4.5 in.) 38 mm (1.5 in.) 85 mm (3.3 in.) 775 mm (30.5 in.) 850 mm (33.5 in.) ±20 2431 mm () ±0.8 95.7 in ±20 2283 mm () ±0.8 89.9 in ±20 1290 mm () ±0.8 50.8 in ±2 0± 0.8 150 mm (5.9 in) ±20 2083 mm ( ±0.8 82.0 in.) Front View Side View Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com ISO 9001 Registered VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. OUTPUT POWER: 900 W MAX. OUTPUT ENERGY: 1.5 J/pulse PULSE DURATION: 10 to 50 ns WAVELENGTH: 248 to 308 nm Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all LAMBDA SX lasers. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. ACCESSORIESDescription Part Number 1232579 1228700 1136304 Pulse Shape Analysis Module Mains Cable, 60 kVA, 25 m Step Up Transformer, 60 kVA LAMBDA SXcoherent.com 27 Very High-Power Excimer Lasers The VYPER Series lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit perfectly to the high power LineBeam 750 (VYPER), LineBeam 1000 (TwinVYPER) and LineBeam 1500 (TriVYPER) optics. FEATURES & BENEFITS • Highest UV power to enable high throughput applications • Excellent energy stability to ensure high production yield • EquiSwitch synchronization to provide lowest jitter • Laser data acquisition to allow advanced process control • Sealed and purged beam path for stable long term operation • Ethernet interface for control and fast data acquisition APPLICATIONS • Excimer Laser Annealing • Pulsed Laser Deposition VYPERNext >