< PreviousSuperior Reliability & Performance 28 VYPER Excimer Lasers and UV Optical Systems SPECIFICATIONS 1 VYPER TwinVYPERTriVYPER Wavelength (nm)308308308 Maximum Stabilized Pulse Energy (mJ)2000 2 4000 3 6000 4 Maximum Stabilized Average Power (W)1200 2 2400 3 3600 4 Maximum Repetition Rate (Hz)600600600 Sum Energy Stability (sigma, %)≤0.45≤0.35≤0.30 Pulse Duration (FWHM, ns)24 ±4 5 24 ±4 5 24 ±4 5 Beam Dimensions 6 (FWHM, V x H, mm2)35 ±4 x 14.5 ±3 5 35 ±4 x 14 .5 ±3 5 35 ±4 x 14.5 ±3 5 Beam Divergence (FWHM, V x H, mrad2)≤4.5 x 1.3 5 ≤4.5 x 1.3 5 ≤4.5 x 1.3 5 Dynamic Gas Lifetime (at max. stabilized energy) (mio. pulses) 100100100 Weight4400 kg/9700 lbs.8800 kg/19,400 lbs.13,200 kg/29,100 lbs. Cooling Water, up to 2x 70 l/min. (2x 18.5 gal./min.), 12 to 15°C Water, up to 4x 70 l/min. (4x 18.5 gal./min.), 12 to 15°C Water, up to 6x 70 l/min. (6x 18.5 gal./min.), 12 to 15°C Electrical2x 39 kVA, 3-phase, 400 VAC, 50 or 60 Hz 4x 39 kVA, 3-phase, 400 VAC, 50 or 60 Hz 6x 39 kVA, 3-phase, 400 VAC, 50 or 60 Hz Dimensions (L x W x H)2800 x 1700 x 2085 7 mm (110 x 66.9 x 82 in.) 2800 x 4950x 2085 7 mm (110 x 195 x 82 in.) 2800 x 8200 x 2085 7 mm (110 x 323 x 82 in.) Part Number132715713286421328643 1 All specifications are subject to change without prior notice in order to provide the best possible product. 2 Sum of two beams. 3 Sum of four beams. 4 Sum of six beams. 5 Per single beam. 6 Beam dimensions measured at 1.0 m from beam exit. 7 ±20 mm (0.8 in.). ExiScope Data Analysis System energy, sum sigma, individual sigma, and much more parameter can be analyzed and displayed with the ExiScope software. VYPERcoherent.com 29 Excimer Lasers and UV Optical Systems VYPER MECHANICAL SPECIFICATIONS 175 mm (6.9 in.) 1712 mm (67.4 in.) 1545 mm (60.8 in.) 733 mm (28.9 in.) 150 ±20 mm (5.9 ±0.8 in.) 1290 ±20 mm (50.8 ±0.8 in.) 2431 ±20 mm (95.7 ±0.8 in.) 2283 ±20 mm (89.9 ±0.8 in.) 2083 ±20 mm (82.0 ±0.8 in.) 150 ±20 mm (5.9 ±0.8 in.) 1290 ±20 mm (50.8 ±0.8 in.) 2431 ±20 mm (95.7 ±0.8 in.) 2283 ±20 mm (89.9 ±0.8 in.) 2083 ±20 mm (82.0 ±0.8 in.) 175 mm (6.9 in.) 1545 mm (60.8 in.) 733 mm (28.9 in.) 175 mm (6.9 in.) 1545 mm (60.8 in.) 1700 mm (66.9 in.)1700 mm (66.9 in.) 1700 mm (66.9 in.) 1668 mm (65.7 in.) 4758 mm (187.3 in.) 4925 mm (193.9 in.) 4913 mm (193.4 in.) 733 mm (28.9 in.) 175 mm (6.9 in.) 1545 mm (60.8 in.) 1712 mm (67.4 in.)1712 mm (67.4 in.) 733 mm (28.9 in.) 175 mm (6.9 in.) 1545 mm (60.8 in.) 1712 mm (67.4 in.) 1700 mm (66.9 in.)1700 mm (66.9 in.) 1668 mm (65.7 in.) 1501 mm (59.1 in.) 1668 mm (65.7 in.) 1501 mm (59.1 in.) 8138 mm (320.4 in.) 8126 mm (319.9 in.) 733 mm (28.9 in.) 150 ±20 mm (5.9 ±0.8 in.) 1290 ±20 mm (50.8 ±0.8 in.) 2431 ±20 mm (95.7 ±0.8 in.) 2283 ±20 mm (89.9 ±0.8 in.) 2083 ±20 mm (82.0 ±0.8 in.) 175 mm (6.9 in.) 1545 mm (60.8 in.) 733 mm (28.9 in.) 1700 mm (66.9 in.) TwinVYPER TriVYPER VYPER VYPERSuperior Reliability & Performance 30 MECHANICAL SPECIFICATIONS VYPER 115 mm (4.5 in.) 38 mm (1.5 in.) 2800 mm (110.2 in.) Side View VYPER Excimer Lasers and UV Optical Systems Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com ISO 9001 Registered Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all VYPER lasers. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. OUTPUT POWER: 5400 W MAX. OUTPUT ENERGY: 9 J/pulse PULSE DURATION: 10 to 50 ns WAVELENGTH: 308 nm ACCESSORIESDescription Part Number 1255022 1224269 1258993 1281270 1228700 1136304 Motorized Optics Module V4, VYPER, Upgrade Kit with Encoder Fast Photodiode Set, VYPER and LSX Gen3 Analysis Software ExiScope V1.2 Tool Trolley, VHP Mains Cable, 60 kVA, 25 m Step Up Transformer, 60 kVA VYPERcoherent.com 31 UVblade Laser Lift-Off Processing UVblade gently detaches delicate polymer-based displays of all types from their rigid glass carriers. Laser Lift-Off separation is the enabling technology in manufacturing flexible displays. UVblade is available at line beam lengths supporting fast and effective separation of substrates and wafers. FEATURES & BENEFITS • Cost effective solutions for Laser Lift-Off (LLO) separation • Pulse on Demand (POD) • Unmatched beam utilization • Scalability in line lengths and energy density OPTIONS • BeamScout Beam Profiler APPLICATIONS • Laser Lift-Off Separation UV bladeSuperior Reliability & Performance 32 SPECIFICATIONSUVblade 250 UVblade 380UVblade 465UVblade 750UVblade 1000 Wavelength (nm)308308308308308 Laser Pulse Energy (mJ) 58058010001000/2000 1 2000 Repetition Rate (Hz) 200200600600600 Energy Density (mJ/cm 2 ) (at 96%) 370340330340/320 1 315 Beam Length (mm) 250380465750950 Beam Width (µm) (at 96%) 400300400250/500 1 400 Homogeneity Long Axis (%, 2σ) 1.81.81.81.81.8 Steepness Short Axis (µm) 1007012570/125 1 85 Depth of Focus (µm) ±200±200±150±100/±150 1 ±100 UVblade Excimer Lasers and UV Optical Systems UVblade Performance 2D-profile of the flat-top short and long axis. 1 High-power version. UV bladecoherent.com 33 Excimer Lasers and UV Optical Systems UVblade MECHANICAL SPECIFICATIONS UVblade 750 2082 mm (82.0 in.) 1667 mm (65.6 in.) 2431 mm (95.7 in.) 1290 mm (50.8 in.) 2713 mm (106.8 in.) 1482 mm (58.3 in.) 2048 mm (80.6 in.) 2800 mm (110.2 in.) 182 mm (7.2 in.) 2717 mm (107.0 in.) 3052 mm (120.2 in.) 2068 mm (81.4 in.) 2673 mm (105.2 in.) 500 mm (19.7 in.) 96 mm (3.8 in.) 850 mm (33.5 in.) 520 mm (20.5 in.) 390 mm (15.4 in.) 548 mm (21.6 in.) 1197 mm (47.1 in.) 6185 mm (243.5 in.) 1050 mm (41.3 in.) Laser: Gen3 LAMBDA SX C-Series Laser: Gen3 LAMBDA SX C-Series Side ViewFront View Top View Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com ISO 9001 Registered VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. AVERAGE POWER: 900 W MAX. OUTPUT ENERGY: 1.5 J/pulse PULSE DURATION: 10 to 50 ns WAVELENGTH: 248 to 308 nm Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all UVblade Systems. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. ACCESSORIESDescription Part Number (on request) BeamScout UV bladeSuperior Reliability & Performance 34 LineBeam Large Format Polysilicon Annealing Demand is rising for high definition and power efficient low temperature polysilicon (LTPS) display backplanes to be the foremost differentiator for mobile devices such as smartphones and tablets. LineBeam systems from Coherent are the enabling technology for mass manufacturing LTPS backplanes on large substrate panels with highest yield. FEATURES & BENEFITS • 308 nm wavelength for high yield OLED and LCD polysilicon annealing • Superior pulse stability and high depth of field to ensure a large process window • Short and long axis beam homogeneity for maximum throughput and beam utilization • Proven performance in leading large-scale OLED and LCD fabs • Active control and observation modules for reproducible annealing results • Line beam lengths scalable up to Gen 10.5 panel size APPLICATIONS • Excimer Laser Annealing (ELA) of polysilicon backplanes for OLED and LCD LineBeam 34coherent.com 35 Excimer Lasers and UV Optical Systems LineBeam LineBeam SPECIFICATIONSLineBeam 750 LineBeam 1000 LineBeam 1300 LineBeam 1500 Wavelength (nm)308 Line Length (mm)750100013001500 Beam Profile TypeTop-hat beam along both axes Depth of Focus (µm)±150±120±120±120 LineBeam Performance Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane. Superior Reliability & Performance 36 LineBeam Excimer Lasers and UV Optical Systems LineBeam 1000 Optical System Top View Coherent, Inc., 5100 Patrick Henry Drive Santa Clara, CA 95054 p. (800) 527-3786 | (408) 764-4983 f. (408) 764-4646 tech.sales@coherent.com www.coherent.com Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all LineBeam Systems. For full details of this warranty coverage, please refer to the Service section at www.coherent.com or contact your local Sales or Service Representative. VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN/IEC 60825-1 (2014) MAX. OUTPUT POWER: 5400 W MAX. OUTPUT ENERGY: 9 J/pulse PULSE DURATION: 10 to 50 ns WAVELENGTH: 308 nm ISO 9001 Registered ACCESSORIESDescription System EnhancementMicro Smoothing Device AC Beam Profiler Beam Scout PEX - Pulse Expander Short Axis Online Monitor Energy Sigma Monitors for Combined and Single Beams Projection Lens Entrance Monitor Process MonitoringLTPS Process Analysis with Crystallization Monitor Front View LineBeamcoherent.com 37 Versatile UV Laser Processing VarioLas processing systems based on the powerful COMPex excimer laser are flexible tools for high quality UV microprocessing. Superior optics design, rugged mechanics and unmatched pulse-to-pulse stability are the key ingredients to each VarioLas model available at 193 nm, 248 nm, and 308 nm. FEATURES & BENEFITS • High resolution optics and mechanics ensure reproducible results • Modular design with tailored options for flexible use • Square beam and line beam fields for optimum results • Supports all COMPex laser models to enable efficient processing APPLICATIONS • Laser Lift-Off Separation • Dopant Ion Activation • Ablative Patterning • Excimer Laser Annealing VarioLasNext >